Dogan, Mustafa2025-01-212025-01-2120210957-45221573-482Xhttps://doi.org/10.1007/s10854-021-06736-2https://hdl.handle.net/20.500.12587/25281Sensors have a wide range of applications from industrial production stages to medical respiratory equipment. The oxygen sensor is also one of the essential sensors to follow up the environmental oxygen level for humans. As an example, a 21% oxygen level is necessary to live safely in an environment and this would create a vital risk for a human being after lowering below 16% oxygen levels. Also in OLED production and lithium battery production processes, following and stabilizing the oxygen level below 5 ppm is mandatory in a glove box while production stages go on. Zirconium oxide is a known metal oxide that gives a sensory response to lowered oxygen levels. In this study, all sensor devices were produced over FTO(fluorine-doped tin oxide) glasses. Sol-gel-derived zirconium(IV) oxide chloride was used as an oxygen detection layer. Zirconium(IV) oxide chloride-coated FTO glass sensor worked successfully and gave a small increasing signal response to changing oxygen levels. A well-known commercially produced PEDOT-PSS(Poly(3,4-ethylene dioxythiophene) polystyrene sulfonate) polymer hole transfer layer was used to increase the oxygen gas sensor's sensitivity and detection range. This second device's performance was evaluated; this added layer could not improve the sensor performance. A new third device was designed; as a new layer over the zirconium-sensing layer, a third LiF layer was added. The third device was tested; polymer, zirconium, and LiF layered the third device and it worked efficiently in a lower oxygen level; furthermore, this design also improved the oxygen sensor detection range.eninfo:eu-repo/semantics/closedAccessArticle3217225062251610.1007/s10854-021-06736-22-s2.0-85112665873Q2WOS:000682646800002Q2