Yazar "Dana, Aykutlu" için listeleme
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Formation of Ge nanocrystals and SiGe in PECVD grown SiNx: Ge thin films
Dana, Aykutlu; Tokay, Serkan; Aydınlı, Atilla (Elsevier Sci Ltd, 2006)Formation of Ge nanocrystals in SiNx matrices has been studied using plasma enhanced chemical vapor deposition in both as deposited samples as well as in post-vacuum annealed samples. Low temperature and short duration ... -
Synthesis and size differentiation of Ge nanocrystals in amorphous SiO 2
Germanosilicate layers were grown on Si substrates by plasma enhanced chemical vapor deposition (PECVD) and annealed at different temperatures ranging from 700-1010 °C for durations of 5 to 60 min. Transmission electron ... -
TEM studies of ge nanocrystal formation in PECVD grown SiO2 : Ge/SiO2 multilayers
Agan, Sedat; Dana, Aykutlu; Aydınlı, A. (Iop Publishing Ltd, 2006)We investigate the effect of annealing on the Ge nanocrystal formation in multilayered germanosilicate-oxide films grown on Si substrates by plasma enhanced chemical vapour deposition (PECVD). The multilayered samples were ...
