Yazar "Aydınlı, Atilla" için Bildiri ve Sunum Koleksiyonu listeleme
-
Formation of Ge nanocrystals and SiGe in PECVD grown SiNx: Ge thin films
Dana, Aykutlu; Tokay, Serkan; Aydınlı, Atilla (Elsevier Sci Ltd, 2006)Formation of Ge nanocrystals in SiNx matrices has been studied using plasma enhanced chemical vapor deposition in both as deposited samples as well as in post-vacuum annealed samples. Low temperature and short duration ...