A NEW METHOD FOR THE MEASUREMENT OF SOFT MATERIAL THICKNESS

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dc.contributor.authorGüler, Mustafa Tahsin
dc.contributor.authorBilican, İsmail
dc.date.accessioned2021-01-14T18:22:16Z
dc.date.available2021-01-14T18:22:16Z
dc.date.issued2020
dc.description.abstractThickness measurement is very critical especially in fabrication of micro and nano devices to determine the thickness of the layers. Stylus measurement is the easiest and most common technique that is being employed among the other thickness measurement methods. Micro-nano fabrication processes requires the usage of both rigid and soft materials. While thickness of a rigid material can be easily detected, thickness measurement of the soft materials presents some difficulties for standard stylus thickness measurement devices. Since the soft materials are deformed by the stylus due to the applied pressure, correct thickness measurement cannot be realized. Here, PDMS (Polydimethylsiloxane) is used as soft material for thickness measurement. By taking the replica of the soft material with liquid plastic which becomes rigid after curing, the depth can be measured easily via conventional stylus thickness measurement devices.en_US
dc.identifier.doi10.31127/tuje.636350
dc.identifier.endpage103en_US
dc.identifier.issn2587-1366
dc.identifier.issue2en_US
dc.identifier.scopus2-s2.0-85167503089
dc.identifier.scopusqualityQ3
dc.identifier.startpage97en_US
dc.identifier.trdizinid342939
dc.identifier.urihttps://doi.org/10.31127/tuje.636350
dc.identifier.urihttps://app.trdizin.gov.tr/makale/TXpReU9UTTVPUT09
dc.identifier.urihttps://hdl.handle.net/20.500.12587/14128
dc.identifier.volume4en_US
dc.indekslendigikaynakScopus
dc.indekslendigikaynakTR-Dizin
dc.language.isoen
dc.relation.ispartofTurkish Journal of Engineering
dc.relation.publicationcategoryMakale - Ulusal Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.titleA NEW METHOD FOR THE MEASUREMENT OF SOFT MATERIAL THICKNESSen_US
dc.typeArticle

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