Resonant Varifocal Mems Mirror
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Dosyalar
Tarih
2022
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
IEEE
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
This paper presents a novel varifocal mirror made of a micro-electromechanical system (MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) via single voltage waveform to vary the focus of a 1.6 mm circular DM. Unlike traditional DMs, REA eliminates the need for individually addressable electrodes and the use of complex influence functions. It also minimizes the electrode count, thereby providing for simpler and faster modulating DMs. The DM was integrated into an adaptive optics system as varifocal mirror. The system was able to realize an 8 cm focal shift between focal lengths of 11 cm and 19 cm by changing the phase angle between the DM drive signal and the pulse signal of the incident laser beam.
Açıklama
35th IEEE International Conference on Micro Electro Mechanical Systems Conference (IEEE MEMS) -- JAN 09-13, 2022 -- Tokyo, JAPAN
Anahtar Kelimeler
Varifocal MEMS mirrors; resonant electrostatic actuation; focus scanning; adaptive optics
Kaynak
2022 Ieee 35th International Conference on Micro Electro Mechanical Systems Conference (Mems)
WoS Q Değeri
N/A
Scopus Q Değeri
Q3
