Resonant Varifocal Mems Mirror

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dc.authoridYavuz, Mustafa/0009-0001-9179-9107
dc.authoridGülsaran, Ahmet/0000-0002-0725-1991
dc.authoridAhmed, Alaaeldin/0000-0002-6963-8462
dc.authoridMukhangaliyeva, Lyazzat/0000-0001-6508-1671
dc.contributor.authorKoçer, Samed
dc.contributor.authorMukhangaliyeva, Lyazzat
dc.contributor.authorSarıtaş, Resul
dc.contributor.authorGülsaran, Ahmet
dc.contributor.authorElhady, Alaa
dc.contributor.authorBell, Kevan
dc.contributor.authorKamel, Amr
dc.date.accessioned2025-01-21T16:33:07Z
dc.date.available2025-01-21T16:33:07Z
dc.date.issued2022
dc.departmentKırıkkale Üniversitesi
dc.description35th IEEE International Conference on Micro Electro Mechanical Systems Conference (IEEE MEMS) -- JAN 09-13, 2022 -- Tokyo, JAPAN
dc.description.abstractThis paper presents a novel varifocal mirror made of a micro-electromechanical system (MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) via single voltage waveform to vary the focus of a 1.6 mm circular DM. Unlike traditional DMs, REA eliminates the need for individually addressable electrodes and the use of complex influence functions. It also minimizes the electrode count, thereby providing for simpler and faster modulating DMs. The DM was integrated into an adaptive optics system as varifocal mirror. The system was able to realize an 8 cm focal shift between focal lengths of 11 cm and 19 cm by changing the phase angle between the DM drive signal and the pulse signal of the incident laser beam.
dc.description.sponsorshipIEEE Micro Electro Mech Syst Tech Community,IEEE
dc.identifier.doi10.1109/MEMS51670.2022.9699771
dc.identifier.endpage966
dc.identifier.isbn978-1-6654-0911-7
dc.identifier.issn1084-6999
dc.identifier.scopus2-s2.0-85126390991
dc.identifier.scopusqualityQ3
dc.identifier.startpage963
dc.identifier.urihttps://doi.org/10.1109/MEMS51670.2022.9699771
dc.identifier.urihttps://hdl.handle.net/20.500.12587/23728
dc.identifier.wosWOS:000784358100245
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherIEEE
dc.relation.ispartof2022 Ieee 35th International Conference on Micro Electro Mechanical Systems Conference (Mems)
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_20241229
dc.subjectVarifocal MEMS mirrors; resonant electrostatic actuation; focus scanning; adaptive optics
dc.titleResonant Varifocal Mems Mirror
dc.typeConference Object

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