A simple approach for the fabrication of 3D microelectrodes for impedimetric sensing

dc.contributor.authorGuler, Mustafa Tahsin
dc.contributor.authorBilican, Ismail
dc.contributor.authorAgan, Sedat
dc.contributor.authorElbuken, Caglar
dc.date.accessioned2020-06-25T18:12:53Z
dc.date.available2020-06-25T18:12:53Z
dc.date.issued2015
dc.departmentKırıkkale Üniversitesi
dc.descriptionGULER, MUSTAFA TAHSIN/0000-0002-0478-3183; Elbuken, Caglar/0000-0001-8359-6871
dc.description.abstractIn this paper, we present a very simple method to fabricate three-dimensional (3D) microelectrodes integrated with microfluidic devices. We form the electrodes by etching a microwire placed across a microchannel. For precise control of the electrode spacing, we employ a hydrodynamic focusing microfluidic device and control the width of the etching solution stream. The focused widths of the etchant solution and the etching time determine the gap formed between the electrodes. Using the same microfluidic device, we can fabricate integrated 3D electrodes with different electrode gaps. We have demonstrated the functionality of these electrodes using an impedimetric particle counting setup. Using 3D microelectrodes with a diameter of 25 mu m, we have detected 6 mu m-diameter polystyrene beads in a buffer solution as well as erythrocytes in a PBS solution. We study the effect of electrode spacing on the signal-to-noise ratio of the impedance signal and we demonstrate that the smaller the electrode spacing the higher the signal obtained from a single microparticle. The sample stream is introduced to the system using the same hydrodynamic focusing device, which ensures the alignment of the sample in between the electrodes. Utilising a 3D hydrodynamic focusing approach, we force all the particles to go through the sensing region of the electrodes. This fabrication scheme not only provides a very low-cost and easy method for rapid prototyping, but which can also be used for applications requiring 3D electric field focused through a narrow section of the microchannel.en_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK)Turkiye Bilimsel ve Teknolojik Arastirma Kurumu (TUBITAK) [112M944]; European UnionEuropean Union (EU) [322019]en_US
dc.description.sponsorshipThis project was supported by The Scientific and Technological Research Council of Turkey (TUBITAK project no. 112M944) and European Union FP7 Marie Curie Career Integration Grant (no. 322019). The authors also thank Dr Aykutlu Dana, Dr Gokhan Bakan and Amir Ghobadi for their help in the measurement setup and their comments on the manuscript.en_US
dc.identifier.citationGuler, Mustafa & Bilican, Ismail & Agan, Sedat & Elbuken, Caglar. (2015). A simple approach for the fabrication of 3D microelectrodes for impedimetric sensing. Journal of Micromechanics and Microengineering. 25(9), 095019.en_US
dc.identifier.doi10.1088/0960-1317/25/9/095019
dc.identifier.issn0960-1317
dc.identifier.issn1361-6439
dc.identifier.issue9en_US
dc.identifier.scopus2-s2.0-84940121344
dc.identifier.scopusqualityQ2
dc.identifier.urihttps://doi.org/10.1088/0960-1317/25/9/095019
dc.identifier.urihttps://hdl.handle.net/20.500.12587/6069
dc.identifier.volume25en_US
dc.identifier.wosWOS:000365167700026
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherIop Publishing Ltden_US
dc.relation.ispartofJournal Of Micromechanics And Microengineering
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectmicrofluidic electrical sensingen_US
dc.subject3D microelectrodesen_US
dc.subjectflow-focusingen_US
dc.subjectparticle countingen_US
dc.subjectmicrofabricationen_US
dc.titleA simple approach for the fabrication of 3D microelectrodes for impedimetric sensingen_US
dc.typeArticle

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