Low-loss as-grown germanosilicate layers for optical waveguides

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dc.contributor.authorAy, F.
dc.contributor.authorAydinli, A.
dc.contributor.authorAgan, S.
dc.date.accessioned2020-06-25T17:35:13Z
dc.date.available2020-06-25T17:35:13Z
dc.date.issued2003
dc.departmentKırıkkale Üniversitesi
dc.descriptionAy, Feridun/0000-0003-2255-1156
dc.description.abstractWe report on systematic growth and characterization of low-loss germanosilicate layers for use in optical waveguide technology. The films were deposited by plasma-enhanced chemical vapor deposition technique using silane, germane, and nitrous oxide as precursor gases. Fourier transform infrared spectroscopy was used to monitor the compositional properties of the samples. It was found that addition of germane leads to decreasing of N-H- and O-H-related bonds. The propagation loss values of the planar waveguides were correlated with the decrease in the hydrogen-related bonds of the as-deposited waveguides and resulted in very low values, eliminating the need for high-temperature annealing as is usually done. (C) 2003 American Institute of Physics.en_US
dc.identifier.citationAy,F., Aydinli, A., Agan S.(2003). Low-loss as-grown germanosilicate layers for optical waveguides. Appl. Phys. Lett. 8 December, 83 (23): 4743–4745.en_US
dc.identifier.doi10.1063/1.1631753
dc.identifier.endpage4745en_US
dc.identifier.issn0003-6951
dc.identifier.issue23en_US
dc.identifier.scopus2-s2.0-0348197100
dc.identifier.scopusqualityQ1
dc.identifier.startpage4743en_US
dc.identifier.urihttps://doi.org/10.1063/1.1631753
dc.identifier.urihttps://hdl.handle.net/20.500.12587/3060
dc.identifier.volume83en_US
dc.identifier.wosWOS:000186970200019
dc.identifier.wosqualityQ1
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherAmer Inst Physicsen_US
dc.relation.ispartofApplied Physics Letters
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.titleLow-loss as-grown germanosilicate layers for optical waveguidesen_US
dc.typeArticle

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